Title :
Lead-free piezoelectric MEMS energy harvesters of stainless steel cantilevers
Author :
Tsujiura, Y. ; Suwa, E. ; Hida, Hirotaka ; Suenaga, K. ; Shibata, Kenji ; Kanno, Issei
Author_Institution :
Kobe Univ., Kobe, Japan
Abstract :
We fabricated piezoelectric MEMS energy harvesters (EHs) of lead-free (K, Na)NbO3 (KNN) thin films on microfabricated stainless steel cantilevers. The 2.2-μm-thick KNN thin films were directly deposited by rf-magnetron sputtering onto the cantilevers, thereby we could simplify fabrication process of the EHs. Because of the strong fracture toughness of stainless steel, the thickness of the cantilevers can be as thin as 30 μm. We obtained large averaged output power of 1.6 μW at 393 Hz and 10 m/s2 for the lead-free unimorph cantilever.
Keywords :
energy harvesting; microfabrication; micromechanical devices; piezoelectric thin films; piezoelectric transducers; potassium compounds; sodium compounds; sputtered coatings; stainless steel; (KNa)NbO3; MEMS energy harvester; RF magnetron sputtering; fracture toughness; lead free unimorph cantilever; lead-free piezoelectric MEMS; microfabricated stainless steel cantilever; power 1.6 muW; size 2.2 mum; thin films; Acceleration; Frequency measurement; Micromechanical devices; Power generation; Resonant frequency; Steel; Vibrations; Energy Harvesting; Lead-Free; Metal Substrate; Piezoelectric Thin Film;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626806
