Digitally programmable resonator by PZT-SOI process

Author

Lafitte, Nicolas ; Takahashi, Tatsuro ; Tani, Motoaki ; Akamatsu, M. ; Yasuda, Y. ; Fujita, Hideaki ; Toshiyoshi, Hiroshi

Author_Institution

Univ. of Tokyo, Tokyo, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

494

Lastpage

497

Abstract

This work presents a PZT-MEMS oscillator array with more than 30 resonance modes that could be selectively excited by choosing an appropriate set of drive and pick-up electrodes distributed on the array network. PZT films of large piezoelectric constant have been developed on a SOI (Silicon-on-Insulator) wafer by using the ADRIP (Arc Discharged Reactive Ion-Plating).

Keywords

arcs (electric); electrochemical electrodes; electroplating; elemental semiconductors; lead compounds; microfabrication; micromechanical resonators; oscillators; piezoelectric oscillations; silicon; silicon-on-insulator; thin film devices; ADRIP; PZT film; PZT-MEMS oscillator array; PZT-SOI process; PZT-Si; arc discharged reactive ion-plating; digitally programmable resonator; drive electrode; pick-up electrode; silicon-on-insulator; Arrays; Electrodes; Laser beams; Micromechanical devices; Optical resonators; Resonant frequency; Silicon; PZT; Piezo-MEMS; coupled oscillator; resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626811

Filename

6626811