Electrical characteristics and preparation of Pb(Zr/sub 0.5/TiO/sub 0.5/)O/sub 3/ ferroelectric films by spray pyrolysis

Pb(Zr_0.5Ti_0.5)O₃ with perovskite structure have been resulted in a remarkable attention due to excellent physical properties include large electrooptic coefficient, high permittivity, pyroeletric, large spontaneous polarization[1]. To date, many techniques adopted to prepare the high-quality PZT films, methods include physical vapor deposition such as sputtering, laser ablation and spray pyrolysis. Spray pyrolysis[2,3] is an economic and convenient processing, and have extensively been used the fabrication of inorganic oxide films and powders, but the literatures on the fabrication and electrical characteristics of PZT films are very few.