Title :
Higher-order Lamé mode square microresonator with improved quality factor and f-Q product
Author :
Rasouli, M.A. ; Hajhashemi, M.S. ; Bahreyni, B.
Author_Institution :
Simon Fraser Univ., Surrey, BC, Canada
Abstract :
This paper reports on the design and experimental characterization of a higher-order Lamé mode to reduce the effect of squeezed-film damping and thus enhancing the Quality factor for near atmospheric pressures. Three vibration modes of the resonator are examined. It is demonstrated that the employing a higher order Lamé modes will result in higher f-Q product compared to the fundamental Lamé and extensional modes of the resonator. For the tested resonator, the Quality factor for the second Lamé mode is 830,000 at a frequency of 16.54MHz resulting in an f-Q product of 1.37×1013 Hz. This is about an order of magnitude higher than the f-Q product for lower modes.
Keywords :
Q-factor; micromechanical resonators; f-Q product; higher-order Lamémode square microresonator; near atmospheric pressures; quality factor; squeezed-film damping; vibration modes; Damping; Microcavities; Oscillators; Q-factor; Resonant frequency; Shape; Anharmonic coupling; Higher modes; Lamé mode; MEMS; Q factor; Squeezed-film damping; f-Q product;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626812