Higher-order Lamé mode square microresonator with improved quality factor and f-Q product

This paper reports on the design and experimental characterization of a higher-order Lamé mode to reduce the effect of squeezed-film damping and thus enhancing the Quality factor for near atmospheric pressures. Three vibration modes of the resonator are examined. It is demonstrated that the employing a higher order Lamé modes will result in higher f-Q product compared to the fundamental Lamé and extensional modes of the resonator. For the tested resonator, the Quality factor for the second Lamé mode is 830,000 at a frequency of 16.54MHz resulting in an f-Q product of 1.37×10¹³ Hz. This is about an order of magnitude higher than the f-Q product for lower modes.