DocumentCode
3454760
Title
Mechanical coupling of dual breathe-mode ring resonator
Author
Yang, Yi ; Ng, Eldwin Jiaqiang ; Ahn, Chong H. ; Hong, Vu A. ; Ahadi, E. ; Kenny, Thomas W.
Author_Institution
Mech. Eng. Dept., Stanford Univ., Stanford, CA, USA
fYear
2013
fDate
16-20 June 2013
Firstpage
502
Lastpage
505
Abstract
We present results from models and measurements showing the emergence of coupling between elements of a micromechanical resonator. By tuning the dimensions of one element, we observe variations in the characteristics of the modes (e.g. frequency, quality factor) that are consistent with models. These results are useful for the design of complex, coupled-element resonators for oscillators and inertial sensors.
Keywords
micromechanical resonators; tuning; vibrations; coupled element resonator; dual breathe mode ring resonator; inertial sensor; mechanical coupling; micromechanical resonator; oscillator application; Acoustic beams; Couplings; Encapsulation; Micromechanical devices; Optical ring resonators; Resonant frequency; Silicon; Coupling; Epi-seal encapsulation; Resonators;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6626813
Filename
6626813
Link To Document