• DocumentCode
    3454838
  • Title

    Nanolithography based on photocatalysis of TiO2 by an atomic force microscope

  • Author

    Kobayashi, Kenkichiro ; Torruta, Y. ; Maeda, Yasuluha

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    218
  • Lastpage
    219
  • Keywords
    Atmospheric measurements; Atomic force microscopy; Atomic layer deposition; Nanolithography; Scanning probe microscopy; Soft lithography; Spatial resolution; Substrates; Surface topography; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245804
  • Filename
    1459554
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3454838