Title :
Indirect wavelength selective infrared micro-emitter using surface plasmon polariton for gas sensing
Author :
Sawada, Tsuyoshi ; Kumagai, Shinya ; Masuno, K. ; Ishii, M. ; Uematsu, Syouji ; Sasaki, Motoharu
Author_Institution :
Toyota Technol. Inst., Nagoya, Japan
Abstract :
A new reflection-type wavelength selective infrared micro-emitter is proposed. Surface plasmon polariton, which occurs on metallic grating at the wavelength near to the pitch of the structure, is used for controlling thermal emission. Emission peak at wavelength near to the period of the grating is observed. The micro-heater is introduced for the thermal emitter. Since the loss due to the thermal conduction from the high temperature region of the micro-heater to the surrounding basement is minimized, the energy is efficiently converted to the infrared designed.
Keywords :
gas sensors; heat conduction; infrared detectors; microfabrication; microsensors; polaritons; surface plasmons; gas sensing; indirect wavelength selective infrared microemitter; metallic grating; microheater; reflection-type wavelength selective infrared microemitter; surface plasmon polariton; thermal conduction; thermal emission; thermal emitter; Absorption; Gratings; Heating; Plasmons; Resists; Silicon; Surface waves; Infrared; Micro-heater; Surface Plasmon Polariton; Wavelength Slective Eitter;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626817