• DocumentCode
    3454860
  • Title

    Indirect wavelength selective infrared micro-emitter using surface plasmon polariton for gas sensing

  • Author

    Sawada, Tsuyoshi ; Kumagai, Shinya ; Masuno, K. ; Ishii, M. ; Uematsu, Syouji ; Sasaki, Motoharu

  • Author_Institution
    Toyota Technol. Inst., Nagoya, Japan
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    518
  • Lastpage
    521
  • Abstract
    A new reflection-type wavelength selective infrared micro-emitter is proposed. Surface plasmon polariton, which occurs on metallic grating at the wavelength near to the pitch of the structure, is used for controlling thermal emission. Emission peak at wavelength near to the period of the grating is observed. The micro-heater is introduced for the thermal emitter. Since the loss due to the thermal conduction from the high temperature region of the micro-heater to the surrounding basement is minimized, the energy is efficiently converted to the infrared designed.
  • Keywords
    gas sensors; heat conduction; infrared detectors; microfabrication; microsensors; polaritons; surface plasmons; gas sensing; indirect wavelength selective infrared microemitter; metallic grating; microheater; reflection-type wavelength selective infrared microemitter; surface plasmon polariton; thermal conduction; thermal emission; thermal emitter; Absorption; Gratings; Heating; Plasmons; Resists; Silicon; Surface waves; Infrared; Micro-heater; Surface Plasmon Polariton; Wavelength Slective Eitter;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6626817
  • Filename
    6626817