Title :
Tunable hydrogel microlens with built-in polymer waveguide and fiber clamp for MEMS applications
Author :
Guan, T. ; Ceyssens, F. ; Puers, Robert
Author_Institution :
ESAT-MICAS, KU Leuven, Leuven, Belgium
Abstract :
This paper presents a photolithographically patterned hydrogel microlens with tunable focal length. EpoClad and EpoCore epoxies are microfabricated to form the integrated optical platform, combining the mechanical fiber clamps, waveguides and the gel setup. The optical focus of the microlens can be adapted by controlling the absorption of a fluid. The focal length can be modulated from 0.3 mm to 1 mm. Placed between two optical waveguides, the microlens acts as light intensity modulator that can change the transmitted intensity up to a factor of 8.
Keywords :
hydrogels; integrated optics; micro-optomechanical devices; microfabrication; microlenses; optical fibre fabrication; optical focusing; optical modulation; optical polymers; photoresists; EpoClad epoxy; EpoCore epoxy; MEMS application; built-in polymer waveguide; integrated optical platform; light intensity modulator; mechanical fiber clamp; microfabrication; optical microlens focus; optical waveguide; photolithographically patterned hydrogel microlens; tunable focal length; tunable hydrogel microlens; Clamps; Lenses; Microoptics; Optical fibers; Polymers; EpoClad; EpoCore; hydrogel; microlens;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626818