A Novel Vertical Field Plate Lateral Device With Ultralow Specific On-Resistance

Author

Wentong Zhang ; Bo Zhang ; Ming Qiao ; Lijuan Wu ; Kun Mao ; Zhaoji Li

Author_Institution

State Key Lab. of Electron. Thin Films & Integrated Devices, Univ. of Electron. Sci. & Technol. of China, Chengdu, China

Volume

61

Issue

2

fYear

2014

fDate

Feb. 2014

Firstpage

518

Lastpage

524

Abstract

A novel vertical field plate (VFP) lateral device with ultralow specific on-resistance (RON,sp) is proposed in this paper. The VFP surrounded by oxide is inserted in the bulk of the drift region. Compared to the surface local depletion of the conventional lateral field plate (LFP), the depletion layer of the VFP expands to the bulk of the drift region, which enhances the bulk electric field. Therefore, ultralow RON,sp is realized in the VFP device due to high drift-region doping (Nd) and short cell pitch. An analytical FP model is developed to describe the behavior of the VFP, in which the breakdown voltage (BV) and Nd are found to be proportional to the FP factor k. Then the uniform-doped VFP laterally diffused MOSs and the step-doped VFP laterally diffused MOS are proposed. The optimized device exhibits a BV of 945 V and a RON,sp of 34 mΩ·cm² which are superior to those of similar devices and the silicon limit.

Keywords

MOSFET; semiconductor device breakdown; semiconductor device models; LFP; VFP laterally diffused MOS; breakdown voltage; depletion layer; drift-region doping; lateral field plate; silicon limit; surface local depletion; ultralow specific on-resistance; vertical field plate lateral device; voltage 945 V; Dielectrics; Doping; Educational institutions; Electric potential; Equations; Etching; Silicon; $R_{{rm ON},{rm sp}}$; Breakdown voltage; enhanced bulk depletion; laterally diffused MOS; silicon limit; surface local depletion; vertical field plate (VFP);

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2013.2294643

Filename

6690127