A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators

Author

Liao, Weixian ; Liu, Wenxin ; Rogers, J.E. ; Tang, Yuchen ; Wang, B.P. ; Xie, Huan

Author_Institution

Univ. of Florida, Gainesville, FL, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

526

Lastpage

529

Abstract

This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror actuated by an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scanning around two in-plane orthogonal axes as well as out-of-plane piston motion The measured resonant frequencies are 112Hz (piston), 346Hz (along x-axis rotation), 1.38kHz (along y-axis rotation) and 4.87kHz (torsional rotation), respectively. The chip size is 4.3mm×2.5mm and the mirror plate is 1.0mm×1.5mm.

Keywords

lead compounds; microactuators; micromirrors; piezoelectric actuators; pistons; PZT; TTP; folded piezoelectric PZT unimorph actuator array; frequency 1.38 kHz; frequency 112 Hz; frequency 346 Hz; frequency 4.87 kHz; in-plane orthogonal axes; out-of-plane piston motion; piezoelectric scanning micromirror; rotational scanning; size 1.0 mm; size 1.5 mm; size 2.5 mm; size 4.3 mm; tip-tilt-piston; Actuators; Arrays; Electrodes; Micromirrors; Pistons; Resonant frequency; MEMS; Micromirror; PZT; PZT Actuators; Piezoelectric; Resonance Scanning; TTP;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626819

Filename

6626819