Abstract :
Biotechnology is being revolutionized by the availability of information about many different genome sequences. Particularly, semiconductor microsensor technology has been applied to various parts of biosensors and chemical sensors[l]. In general, conventional methods for protein analysis include optical measurements, electrochemistry measurements, mass spectrometry. These methods have disadvantages in terms of time-consuming, expensive equipment and portable diagnostic application: Above all, it was difficult to apply in the Si micro-fluidic channel. To overcome these problems, The introduction of a 3-dimensional metal oxide semiconductor field effect transistor(3-D MOSFET) in silicon micro-fluidic channel is needed in the integrated biochemical detection system[2]. A 3-D MOSFET for the application in the micro-fluidic channel provides many advantages such as miniaturization, standardization, mass production and highly suitable configuration for smart sensors in which both the sensor and measurement circuit are integrated. In this study, we have fabricated a p-channel 3-D MOSFET-type biosensor in order to detect a protein biomolecule. Its electrical characteristics have been investigated. Furthermore, a surface piasmon resonance(SPR) experiment was performed under the same condition to verify interactions among self-assembled monolayer(SAM), streptavidin and biotin[3].
