Title :
A new method to determine the internal pressure and leakage rate of MEMS packages
Author :
Wang, Bingdong ; De Coster, J. ; Witvrouw, A. ; Simone, S. ; Wevers, M. ; De Wolf, Ingrid
Author_Institution :
Imec, Leuven, Belgium
Abstract :
Several classes of microelectromechanical systems (MEMS) are sensitive to the internal pressure inside their packages. From functionality and reliability point of view, knowing and monitoring this pressure is important. This paper demonstrates for the first time a new method to measure the internal pressure of the package and, in addition, its leakage rate. It is based on an innovative use of the Focused Ion Beam (FIB) together with a measurement of pressure sensitive parameters.
Keywords :
focused ion beam technology; micromechanical devices; reliability; MEMS packages; focused ion beam; internal pressure; leakage rate; pressure sensitive parameters; reliability point of view; Capacitance; Micromechanical devices; Monitoring; Packaging; Pressure measurement; Q measurement; Temperature measurement; MEMS package; hermeticity; internal pressure; leakage rate;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626827
