DocumentCode :
3455156
Title :
A Database For The Etching of LGS in H2SO4: H2O
Author :
Tellier, C.R. ; Akil, M. ; Leblois, T.G.
Author_Institution :
Inst. FEMTO-ST, Besancon
fYear :
2007
fDate :
May 29 2007-June 1 2007
Firstpage :
672
Lastpage :
677
Abstract :
Twelve differently oriented LGS plates were etched in a H2SO4: H2O solution. 2D etching shapes (profilometry traces and out-of-roundness profiles) were analyzed to determine the dissolution constants that characterize the anisotropy. After adjustments theoretical etching shapes derived from the self-elaborated simulator TENSOSIM were found to be in close agreement with experimental shapes supporting the validity of the present database.
Keywords :
etching; plates (structures); H2SO4:H2O; LGS plates; TENSOSIM self-elaborated simulator; anisotropy; dissolution constants; etching database; Anisotropic magnetoresistance; Chemicals; Crystalline materials; Databases; Micromachining; Micromechanical devices; Shape; Surface topography; Water; Wet etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location :
Geneva
ISSN :
1075-6787
Print_ISBN :
978-1-4244-0646-3
Electronic_ISBN :
1075-6787
Type :
conf
DOI :
10.1109/FREQ.2007.4319159
Filename :
4319159
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3455156
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