Fabrication of a MEMS-based PCR micro-reactor, using IR heating

Since Northrup et al. have realized a PCR (polymerase chain reaction) chip using MEMS (micro-electro-mechanical systems) technology in 1993 [l], a great deal of effort has been dedicated to the development of miniaturized PCR chips by a number of laboratories. A wide variety of materials, such as silicon, glass, PDMS (poly-dimethylsiloxane), polyimide and so on, has been used to realize the PCR chips. In our work, silicon and glass wafers are used as bottom and top parts of the device, respectively. Due to the fact that silicon has more advantages of well-developed deposition and etching technologies than other materials, silicon is chosen for the bottom wafer where the PCR micro-chamber is fabricated. The transparent top glass opens a channel to the direct observation of the sample in the PCR chamber.