Title :
A silicon microseismometer for Mars
Author :
Pike, W.T. ; Standley, I.M. ; Calcutt, S.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. London, London, UK
Abstract :
The design, fabrication and testing of a microseismometer for the InSight mission to Mars and described. Particular challenges include accommodation of Martian gravity while allowing testing on Earth and surviving the 2000g shock profile of the mission while maintaining a nano-g sensitivity.
Keywords :
Earth; Mars; elemental semiconductors; gravimeters; gravity; microfabrication; microsensors; seismometers; silicon; Earth; InSight mission; Mars; Martian gravity; Si; mass 2000 g; nano-g sensitivity; shock profile; silicon microseismometer; Earth; Electric shock; Mars; Noise; Suspensions; Testing; Transducers; Micromachined accelerometer suspension shock planetary;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626843
