Title :
SH Wave Propagation in Semiconductor/Piezoelectric Structures
Author :
Du, Jianke ; Jin, Xiaoying ; Wang, Ji
Author_Institution :
Ningbo Univ., Ningbo
fDate :
May 29 2007-June 1 2007
Abstract :
SH wave propagation in a piezoelectric half-space covered by a semiconductor film with initial stress is investigated analytically. The equilibrium equations for semiconductors with initial stress are presented. The dispersion relation of SH waves is obtained for different thickness of the film and wavenumber.
Keywords :
acoustic dispersion; acoustic wave propagation; acoustoelectric devices; piezoelectric materials; semiconductor thin films; SH wave propagation; dispersion relation; equilibrium equations; initial stress; piezoelectric half-space; semiconductor film; semiconductor/piezoelectric structures; wavenumber; Acoustic propagation; Acoustic waves; Acoustoelectric effects; Dispersion; Equations; Piezoelectric devices; Piezoelectric films; Residual stresses; Semiconductor films; Surface waves;
Conference_Titel :
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location :
Geneva
Print_ISBN :
978-1-4244-0646-3
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2007.4319176
