Title :
Fabrication of micro-probe beam using MEMS technology for new vertical silicon probe card
Author :
Mm, Y. ; Yoon, Ho-Cheol ; Seo, Chang-Taeg ; Lee, Jong-Hyun
Keywords :
Annealing; Etching; Fabrication; Micromachining; Micromechanical devices; Needles; Probes; Silicon; Testing; Very large scale integration;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245646
