• DocumentCode
    3455585
  • Title

    Fabrication Of Poly-silicon Tft On The Glass Substrate By Metal-induced Lateral Crystallization

  • Author

    Kim, Tae-Kyung ; Lee, Byung-II ; Kim, Kwang-Ho ; Shin, Jin-Wook ; Pyung-Soo Ahn ; Jeong, Won-Cheol ; Joo, Seung-Ki

  • fYear
    1997
  • fDate
    13-14 Feb 1997
  • Firstpage
    61
  • Lastpage
    62
  • Keywords
    Annealing; Contamination; Crystallization; Fabrication; Glass; Liquid crystals; Nickel; Sputtering; Substrates; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Information Display, 1997., Proceedings of the Fourth Asian Symposium on
  • Print_ISBN
    962-8273-01-9
  • Type

    conf

  • DOI
    10.1109/ASID.1997.631398
  • Filename
    631398
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3455585