• DocumentCode
    3455606
  • Title

    Piezoelectric LiNbO3 and LiTaO3 films for SAW device applications

  • Author

    Shibata, Y. ; Kuze, N. ; Kaya, K. ; Matsui, M. ; Kanai, M. ; Kawai, T.

  • Author_Institution
    Central Lab., Asahi Chem. Ind. Co. Ltd., Shizuoka, Japan
  • Volume
    1
  • fYear
    1996
  • fDate
    3-6 Nov 1996
  • Firstpage
    247
  • Abstract
    Extremely high quality films of LiNbO3 and LiTaO3 are deposited on sapphire and LiTaO3 substrates using Ar-F excimer laser ablation. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. SAW velocity, electromechanical coupling coefficients and frequency response are calculated. Experimental data of SAW properties coincide with calculated data
  • Keywords
    acoustic materials; electromechanical effects; epitaxial layers; frequency response; lithium compounds; piezoelectric thin films; pulsed laser deposition; surface acoustic wave devices; surface acoustic waves; ultrasonic velocity; vapour phase epitaxial growth; Al2O3; Ar-F excimer laser ablation; LiNbO3; LiTaO3; LiTaO3 substrate; SAW device applications; SAW velocity; electromechanical coupling coefficients; epitaxial films; frequency response; high quality films; piezoelectric LiNbO3 films; piezoelectric LiTaO3 films; sapphire substrate; Frequency; Optical films; Optical pulses; Piezoelectric films; Pulsed laser deposition; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; X-ray diffraction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
  • Conference_Location
    San Antonio, TX
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-3615-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1996.583968
  • Filename
    583968
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3455606