Title :
Piezoelectric LiNbO3 and LiTaO3 films for SAW device applications
Author :
Shibata, Y. ; Kuze, N. ; Kaya, K. ; Matsui, M. ; Kanai, M. ; Kawai, T.
Author_Institution :
Central Lab., Asahi Chem. Ind. Co. Ltd., Shizuoka, Japan
Abstract :
Extremely high quality films of LiNbO3 and LiTaO3 are deposited on sapphire and LiTaO3 substrates using Ar-F excimer laser ablation. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. SAW velocity, electromechanical coupling coefficients and frequency response are calculated. Experimental data of SAW properties coincide with calculated data
Keywords :
acoustic materials; electromechanical effects; epitaxial layers; frequency response; lithium compounds; piezoelectric thin films; pulsed laser deposition; surface acoustic wave devices; surface acoustic waves; ultrasonic velocity; vapour phase epitaxial growth; Al2O3; Ar-F excimer laser ablation; LiNbO3; LiTaO3; LiTaO3 substrate; SAW device applications; SAW velocity; electromechanical coupling coefficients; epitaxial films; frequency response; high quality films; piezoelectric LiNbO3 films; piezoelectric LiTaO3 films; sapphire substrate; Frequency; Optical films; Optical pulses; Piezoelectric films; Pulsed laser deposition; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; X-ray diffraction;
Conference_Titel :
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
0-7803-3615-1
DOI :
10.1109/ULTSYM.1996.583968
