Title :
Fabrication of silicon and germanium nanostructures by combination of hydrogen plasma dry etching and VLS growth mechanism
Author :
Yang, Ming-Che ; Shich, J. ; Ko, Tsung-Shine ; Chen, Hsuen-Li ; Chu, Tieh-Chi
Keywords :
Dry etching; Fabrication; Germanium; Gold; Hydrogen; Nanoparticles; Nanostructures; Nanowires; Plasma applications; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245649
