Surface acoustic wave channel waveguides by AlN films

Author

Giannelli, K. ; Giovannini, L. ; Verona, E. ; Socino, G.

Author_Institution

Ist. di Acustica, CNR, Rome, Italy

Volume

1

fYear

1996

fDate

3-6 Nov 1996

Firstpage

289

Abstract

Surface acoustic wave (SAW) channel waveguides have been fabricated by sputtering deposition of AlN films on YX- and XY-LiNbO₃ substrates. Since the SAW phase velocity is higher in AlN than in the substrate, the supported film acts as a cladding for the guide, while the unmodified substrate corresponds to the core. Both single channel and two-channel waveguides in the configuration of an acoustic coupler have been investigated. Measurement of the acoustic field in the guiding structures has been done by use of acoustooptic probing techniques. The guiding properties of the guides have been probed at different distances from the transducer. In the case of two-channel waveguides the coupling length for the fundamental mode has been measured for different guide separation distances

Keywords

aluminium compounds; sputtered coatings; surface acoustic wave couplers; surface acoustic wave waveguides; AlN; AlN film; LiNbO₃; LiNbO₃ substrate; SAW phase velocity; acoustic coupler; acoustic field; acoustooptic probe; cladding; fabrication; single channel waveguide; sputtering deposition; surface acoustic wave channel waveguide; transducer; two-channel waveguide; Acoustic devices; Acoustic propagation; Acoustic waveguides; Acoustic waves; Optical films; Optical surface waves; Optical waveguides; Sputtering; Substrates; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE

Conference_Location

San Antonio, TX

ISSN

1051-0117

Print_ISBN

0-7803-3615-1

Type

conf

DOI

10.1109/ULTSYM.1996.583976

Filename

583976