Title :
Enhanced columnar structure in CsI layer by substrate patterning
Author :
Jing, Tao ; Cho, G. ; Drewery, J. ; Fujieda, I. ; Kaplan, S.N. ; Mireshghi, A. ; Perez-Mendez, V. ; Wildermuth, D.
Author_Institution :
Lawrence Berkely Lab., California Univ., CA, USA
Abstract :
Columnar structure in evaporated can be controlled by patterning substrates as well as varying evaporation conditions. Mesh-patterned substrates with various dimensions were created by spin-coating polyimide on glass or amorphous silicon substrates and defining patterns with a standard photolithography technique. CsI(Tl) layers 200-1000 mu m were evaporated. Scintillation properties of these evaporated layers, such as light yield and speed, were equivalent to those of the source materials. The spatial resolution of X-ray detectors consisting of these layers and a linear array of Si photodiodes was evaluated by exposing them to a 25- mu m narrow beam of X-rays. The results obtained with 200- mu m-thick CsI layers coupled to a linear photodiode array with 20-dots/mm resolution showed that the spatial resolution of CsI(Tl) evaporated on patterned substrates was about 75 mu m full width at half maximum (FWHM) whereas that of CsI(T) on flat substrates was about 220 mu m FWHM. Micrographs taken by scanning electron microscopy revealed that these layers retained the well-defined columnar structure originating from substrate patterns.<>
Keywords :
X-ray detection and measurement; caesium compounds; photolithography; position sensitive particle detectors; scanning electron microscope examination of materials; scintillation counters; tellurium; 200 to 1000 micron; 25 micron; 75 micron; CsI(Tl) layers; CsI:Tl; Si; Si photodiodes; X-ray detectors; amorphous Si substrate; columnar structure; glass substrate; light yield; photolithography; polyimide; scanning electron microscopy; spatial resolution; speed; spin-coating; substrate patterning; Brightness; Electromagnetic wave absorption; Laboratories; Photodiodes; Polyimides; Radiation detectors; Radiography; Spatial resolution; Substrates; Thermal expansion;
Conference_Titel :
Nuclear Science Symposium and Medical Imaging Conference, 1991., Conference Record of the 1991 IEEE
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-0513-2
DOI :
10.1109/NSSMIC.1991.258889