DocumentCode
3455868
Title
Novel evaluation system for EUV resist in NewSUBARU
Author
Lee, Seung Yoon ; Watanabe, Takeo ; Kinoshita, Hiroo ; Sakaya, Noriyuki ; Shoki, Tsutomu
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
290
Lastpage
291
Keywords
Chemicals; Mirrors; Nonhomogeneous media; Optical pumping; Optical reflection; Optical sensors; Optical surface waves; Particle beam optics; Resists; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245657
Filename
1459591
Link To Document