DocumentCode :
3455868
Title :
Novel evaluation system for EUV resist in NewSUBARU
Author :
Lee, Seung Yoon ; Watanabe, Takeo ; Kinoshita, Hiroo ; Sakaya, Noriyuki ; Shoki, Tsutomu
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
290
Lastpage :
291
Keywords :
Chemicals; Mirrors; Nonhomogeneous media; Optical pumping; Optical reflection; Optical sensors; Optical surface waves; Particle beam optics; Resists; Ultraviolet sources;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245657
Filename :
1459591
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3455868
