DocumentCode :
3455871
Title :
Development of the fabrication platforms for MEMs technology
Author :
Fang, Weileun ; Hsieh, Jenvei ; Lin, Hung-Yi ; Wu, Mingching ; Chu, Huai-Yuan
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
292
Lastpage :
293
Keywords :
Etching; Fabrication; Microelectromechanical devices; Micromechanical devices; Optical attenuators; Optical films; Optical switches; Silicon; Substrates; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245658
Filename :
1459592
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3455871
