DocumentCode :
3455948
Title :
Fabrication of nano-manipulator with SiO2/DLC hetero-structure by focused-lon-beam chemical-vapor-deposition
Author :
Kometani, Reo ; Hoshino, Takayulu ; Nakamatsu, Ken-Iciro ; Kondo, Kamshige ; Kanda, Kazuhro ; Haruyama, Y. ; Kaito, Takashi ; Fujita, Jun-ichi ; Ichihashi, Tosl-Hari ; Ochiai, Yukinori ; Matsui, Shinji
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
296
Lastpage :
297
Keywords :
Chemicals; Conductivity; Dielectrics and electrical insulation; Electric resistance; Electric variables; Electric variables measurement; Electrostatics; Fabrication; Fingers; Focusing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245660
Filename :
1459594
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3455948
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