Single chip process for sensors implementation, integration, and condition monitoring

This study presents the development of a foundry available process scheme for MEMS devices. Such MEMS process scheme enables integration of various MEMS sensors with Pirani gauge. In applications, this study has employed such bulk Si with embedded poly plug process scheme to demonstrate various MEMS devices of different vacuum requirement, including resonators, accelerometer, gyroscope, and magnetometers on single Si wafer. Moreover, a monolithically integrated silicon-based Pirani vacuum gauge to provide in situ pressure monitor for each device is also demonstrated.