Title :
Micromachined silicon ultrasonic atomizer
Author :
Lal, Amit ; White, Richard M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
High amplitude ultrasound, generated by a micromachined silicon resonant transducer, was used to atomize and pump liquids. The needle-shaped device made by bonding two silicon horns, is driven by lead-zirconate-titanate (PZT) piezoelectric plates. Water was atomized continuously at feed rates of 2.4 ml/min into a mist with mean drop size of 25 μm at a 72 kHz resonance frequency. An isopropanol mist was ignited to produce a spray combustion flame
Keywords :
acoustic applications; acoustic transducers; micromachining; silicon; sprays; ultrasonic applications; ultrasonic transducers; 25 micron; 72 kHz; PZT; PZT piezoelectric plate; PbZrO3TiO3; Si; isopropanol mist; liquid pump; micromachining; needle-shaped device; resonant transducer; silicon horn bonding; spray combustion flame; ultrasonic atomizer; water drop size; Bonding; Feeds; Liquids; Piezoelectric transducers; Resonance; Resonant frequency; Silicon; Thermal spraying; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
0-7803-3615-1
DOI :
10.1109/ULTSYM.1996.583987
