DocumentCode
3456087
Title
Improved spray coating of photoresist for three-dimensional photolithography over deep structure
Author
Singh, Vijay Kumar ; Sasaki, Minoru ; Watanabe, Yoshihiko ; Kawakita, Masato ; Hayashi, Hiroki ; Hane, Kazuhiro
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
306
Lastpage
307
Keywords
Anisotropic magnetoresistance; Coatings; Lithography; Optical device fabrication; Optical fibers; Resists; Silicon; Spraying; Temperature; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245665
Filename
1459599
Link To Document