DocumentCode
3456129
Title
Selective organic dielectric deposition for encapsulation of MEMS structure
Author
Sakata, Tomomi ; Ishii, Hiromu ; Okabe, Yuichi ; Nagase, Masao ; Yano, Masaki ; Kudou, Kazuhisa ; Kamei, Toshikazu ; Machida, Katsuyuki
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
308
Lastpage
309
Keywords
Atomic force microscopy; Dielectrics; Encapsulation; Gold; Micromechanical devices; Microstructure; Optical films; Optical microscopy; Surface morphology; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245666
Filename
1459600
Link To Document