Atomically-precise three-dimensional top down fabrication

Semiconductor manufacturing has provided a fabrication technology with ever-improving precision that is extremely cost-effective at producing transistors but provides poor relative precision at the limits of its resolution. Recent efforts at developing tip based nanofabrication are breaking out of 2D into 3D structures that achieve atomic precision with top down control. Coincidentally, applications that require atomic precision have begun to emerge. This talk will review progress towards atomically precise manufacturing, describe some of the near term applications such as nano electro mechanical systems, sensors, QuBit devices, and nanoimprint templates, and prospects for scaling up the throughput of atomically precise fabrication technology.