Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices

While the current trend in nanoscale materials characterization is to investigate single domain (mechanical, electrical, thermal) properties, this study explore if the extremely small size also `couples´ these domains. However, even single domain studies are challenging at the nanoscale and the literature suggests the need for new multi-domain characterization techniques. In this paper, we present experimental design for performing nanoscale multi-physics characterizations. Demonstrative results on the role of mechanical strain on the thermal and electrical conductivity of metals, semiconductors and insulators are also presented.