High throughput electron beam recorder with arrayed microcolumns

Author

Kim, Hak S. ; Kim, D.W. ; Ahn, S.J. ; Kim, Y.C. ; Seol, M.H.

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

314

Lastpage

315

Keywords

Assembly; Cities and towns; DVD; Electron beams; Electron optics; High speed optical techniques; Lithography; Optical recording; Physics; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245669

Filename

1459603

Link To Document