High precision frequency synthesizer based on MEMS piezoresistive resonator

In this paper, we present a detailed description of a MEMS frequency synthesizer product, including the principle, processing, system architecture, and reliability and characterization results. The synthesizer is based on a MEMS piezoresistive dog-bone shaped resonator, having a resonant frequency of 56 MHz, and a Q-factor of >40,000. Using a specific temperature compensation algorithm, the output frequency can be kept stable within ±20 ppm over an operating temperature from -20°C to +85°C. Jitter over a bandwidth from 12 kHz to 20 MHz is typically 2.96 ps. The product has been proven to be manufacturable using standard industrial processes, and to be reliable against various stress and life-time tests.