High precision frequency synthesizer based on MEMS piezoresistive resonator

Author

Phan, K.L. ; van Ansem, T. ; van der Avoort, C. ; van Beek, J.T.M. ; Goossens, M.J. ; Jose, Sneha ; Lander, R.J.P. ; Menten, S. ; Naass, T. ; Sistermans, J. ; Stikvoort, E. ; Swartjes, F. ; Wortel, K. ; in´t Zandt, M.A.A.

Author_Institution

R&D, NXP Semicond., Eindhoven, Netherlands

fYear

2013

fDate

16-20 June 2013

Firstpage

802

Lastpage

805

Abstract

In this paper, we present a detailed description of a MEMS frequency synthesizer product, including the principle, processing, system architecture, and reliability and characterization results. The synthesizer is based on a MEMS piezoresistive dog-bone shaped resonator, having a resonant frequency of 56 MHz, and a Q-factor of >40,000. Using a specific temperature compensation algorithm, the output frequency can be kept stable within ±20 ppm over an operating temperature from -20°C to +85°C. Jitter over a bandwidth from 12 kHz to 20 MHz is typically 2.96 ps. The product has been proven to be manufacturable using standard industrial processes, and to be reliable against various stress and life-time tests.

Keywords

VHF devices; compensation; frequency synthesizers; life testing; microfabrication; micromechanical resonators; piezoresistive devices; semiconductor device reliability; semiconductor device testing; MEMS frequency synthesizer product; MEMS piezoresistive dog-bone shaped resonator; Q-factor; bandwidth 12 kHz to 20 MHz; frequency 56 MHz; industrial processing; life-time testing; reliability; stress testing; temperature -20 degC to 85 degC; temperature compensation algorithm; time 2.96 ps; Frequency measurement; Frequency synthesizers; Micromechanical devices; Oscillators; Resonant frequency; Temperature measurement; Temperature sensors; MEMS; fractional-N PLL; frequency synthesizer; phase noise; piezoresistive resonator; reliability; temperature compensation; thin-film capping;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626888

Filename

6626888