• DocumentCode
    3456308
  • Title

    Nano-processing tool using a carbon nanotube nano-heater

  • Author

    Akita, OSeiji ; Cai, Xiaoyu ; Nakayama, Yoshikazu

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    320
  • Lastpage
    321
  • Keywords
    Carbon nanotubes; Charge coupled devices; Charge-coupled image sensors; Electrodes; Nanoscale devices; Optical fibers; Optical sensors; Scanning electron microscopy; Stimulated emission; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245672
  • Filename
    1459606