Title :
Nano-processing tool using a carbon nanotube nano-heater
Author :
Akita, OSeiji ; Cai, Xiaoyu ; Nakayama, Yoshikazu
Keywords :
Carbon nanotubes; Charge coupled devices; Charge-coupled image sensors; Electrodes; Nanoscale devices; Optical fibers; Optical sensors; Scanning electron microscopy; Stimulated emission; Temperature sensors;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245672