Title :
Effect Of The Compensation Layer On The Performance Of A-SI:H TFTs
Author :
Shaoqiang Zhang ; Zhongyang Xu ; Xuecheng Zou ; Changan Wang ; Xuemei Zhou ; Bofang Zhao ; Yongbin Dai ; Xinheng Wan ; Hui Ding
Keywords :
Active matrix liquid crystal displays; Conductivity; Electrodes; Hydrogen; Passivation; Plasma applications; Plasma properties; Plasma temperature; Substrates; Thin film transistors;
Conference_Titel :
Information Display, 1997., Proceedings of the Fourth Asian Symposium on
Conference_Location :
Hong Kong, China
Print_ISBN :
962-8273-01-9
DOI :
10.1109/ASID.1997.631402