Title : 
Fabrication of hfc coated Si field emitter arrays with a built-in poly-Si TFT
         
        
            Author : 
Nagao, M. ; Sacho, Y. ; Kanemaru, S. ; Matsukawa, T. ; Itoh, J.
         
        
        
        
        
        
            Keywords : 
Active matrix technology; Argon; Fabrication; Field emitter arrays; Flat panel displays; Glass; Hybrid fiber coaxial cables; Niobium; Temperature; Thin film transistors;
         
        
        
        
            Conference_Titel : 
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
         
        
            Print_ISBN : 
4-99024720-5
         
        
        
            DOI : 
10.1109/IMNC.2004.245628