Title :
Fabrication of micro field emitter tip using ion-bearn irradiation-induced self-standing of thin film
Author :
Yoshida, Tomoya ; Baba, Akiyoshi ; Asano, Tanemasa
Keywords :
Anodes; Fabrication; Lithography; Microelectronics; Phosphors; Scanning electron microscopy; Sputter etching; Substrates; Tensile stress; Transistors;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245629
