Title :
Feasibility study of a multiple beam SEM for a defect inspection
Author :
Nakasuji, M. ; Yoshikawa, S. ; Satake, T. ; Noji, N.
Keywords :
Electron beams; Electron optics; Electrostatic measurements; Inspection; Lenses; Optical beams; Optical detectors; Particle beams; Scanning electron microscopy; Stimulated emission;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245636
