Title :
Micromachined acceleration switch with bi-directionally tunable threshold
Author :
Kim, Hyun-Suk ; Jang, Y.-H. ; Hwang, Y.-S. ; Kim, Y.-K. ; Kim, J.-M.
Author_Institution :
Seoul Nat. Univ., Seoul, South Korea
Abstract :
A micromachined acceleration switch capable of adjusting the threshold acceleration to either higher or lower levels is firstly proposed. Comb drive actuators are used for the realization of threshold tuning. The acceleration switch is successfully fabricated using a silicon-on-glass process. The resonant frequency of the acceleration switch is measured to be 1.036 kHz, and the switch is turned on at 11 g without tuning voltage. It takes 9.7 ms for the switch to turn on, and the threshold acceleration is successfully increased to 19 g and decreased to 3 g by applying 30 V to pulling or pushing comb, respectively.
Keywords :
accelerometers; frequency measurement; microactuators; micromachining; microswitches; silicon-on-insulator; MEMS; bi-directionally tunable threshold; comb drive actuators; micromachined acceleration switch; resonant frequency measured; silicon-on-glass process; threshold acceleration; threshold tuning; Acceleration; Contacts; Frequency measurement; Optical switches; Semiconductor device measurement; Voltage measurement; Acceleration switch; MEMS; comb drive actuator; threshold tuning;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626921
