Title :
Frequency Trimming for MEMS Resonator Oscillators
Author :
Hsu, Wan-Thai ; Brown, Andrew R.
Author_Institution :
Discera Inc., Ann Arbor
fDate :
May 29 2007-June 1 2007
Abstract :
This paper presents various frequency trimming methodologies with the focus on silicon based micromechanical resonators. The techniques include mechanical trimming and pure electronic trimming. The experimental results showed the frequency accuracy have reached 2.6 ppm for mechanical trimming and lppm for electronic trimming. Furthermore, the technique of digital electronic trimming resolved the temperature compensation issues for MEMS resonators at the same time.
Keywords :
microcavities; micromechanical resonators; oscillators; MEMS resonator oscillators; electronic trimming; frequency trimming; mechanical trimming; silicon based micromechanical resonators; Band pass filters; Circuits; Clocks; Crystals; Micromechanical devices; Optical materials; Oscillators; Phase locked loops; Resonant frequency; Silicon;
Conference_Titel :
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location :
Geneva
Print_ISBN :
978-1-4244-0646-3
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2007.4319247
