Title :
Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses
Author :
Younkin, R. ; Mazur, E. ; Carey, J.E. ; Crouch, C. ; Levinson, J.A. ; Friend, C.M.
Author_Institution :
Dept. of Phys., Harvard Univ., Cambridge, MA, USA
Abstract :
Summary form only given. Previous work in our group has shown that novel conical microstructures are formed on the surface of silicon when it is irradiated with 100-fs laser pulses in the presence of halogen-containing gases. Structures are also formed using other background gases, such as N/sub 2/ or air, but they tend to be more blunt and irregular in shape. We have measured the optical,properties of microstructures formed in various gases. The structures are typically 1 /spl mu/m wide at the top and several /spl mu/m wide at the base, with a height in the range 1-20 /spl mu/m, depending on ambient gas pressure, and laser fluence.
Keywords :
crystal microstructure; high-speed optical techniques; infrared spectra; laser beam machining; micromachining; silicon; 1 micron; 1 to 20 micron; 100 fs; N/sub 2/; Si; ambient gas pressure; background gases; background pressure; conical silicon microstructures; femtosecond-laser pulses; fs laser pulses; gas species; halogen-containing gases; infrared absorption; laser beam machining; laser fluence; laser parameters; micromachining; microstructures; optical properties; Electromagnetic wave absorption; Gas lasers; Gases; Microstructure; Optical pulses; Optical surface waves; Shape measurement; Silicon; Sulfur hexafluoride; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-662-1
DOI :
10.1109/CLEO.2001.948160
