DocumentCode :
3457088
Title :
An introduction to laser microfabrication
Author :
Christensen, C.P.
Author_Institution :
Potomac Photonics, Inc.
fYear :
2001
fDate :
11-11 May 2001
Firstpage :
556
Lastpage :
557
Abstract :
Summary form only given. Miniature devices and microsystems are becom??ing increasingly important in our everyday lives,and laser tools are frequently used to fabricate and interconnect them. However, from the perspective of the manufacturing engineer, lasers are just one of several tools that can be utilized in microfabrication. Lasers are not the solution to every problem, but they offer an interesting mix of capabilities-feature resolution extending into the micron range, applicability to a very wide range of materials, processing in ambient air, and adaptability to automation.
Keywords :
Electromagnetic wave absorption; Gas lasers; Gases; Microstructure; Optical pulses; Optical surface waves; Shape measurement; Silicon; Sulfur hexafluoride; Ultrafast optics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-662-1
Type :
conf
DOI :
10.1109/CLEO.2001.948161
Filename :
948161
Link To Document :
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