All-oxide microcantilevers: Perspectives for device applications

Author

Pellegrino, Laurent ; Manca, N. ; Kanki, T. ; Yamasaki, Shintaro ; Tanaka, Hiroya ; Biasotti, M. ; Buzio, R. ; Bellingeri, E. ; Ceriale, V. ; Siri, A.S. ; Marre, D.

Author_Institution

SPIN, Genoa, Italy

fYear

2013

fDate

16-20 June 2013

Firstpage

988

Lastpage

991

Abstract

We report our results on the use of micromechanical structures, such as microcantilevers (MCs), entirely based on transition metal oxides (TMOs) for the development of sensors and devices with materials at the verge of different physical states. We will discuss details of the fabrication processes and show three applications that originate from the possibility of stretching, heating and set into oscillation free-standing crystalline films or heterostructures made with these functional materials.

Keywords

cantilevers; microfabrication; microsensors; thin film sensors; MC; TMO; all-oxide microcantilever; fabrication processing; heating; heterostructure functional material; micromechanical structure; oscillation free-standing crystalline film; sensor; stretching; transition metal oxide; Epitaxial growth; Fabrication; Resistance; Strain; Substrates; Cantilevers; Correlated Oxide Materials; Joule-heating; Microelectromechanical Systems; Resonators; Strain;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626935

Filename

6626935