Title :
Batch fabricated flexible tactile sensor based on carbon nanotube-polymer composites
Author :
Pyo, Soonjae ; Lee, Jin-Il ; Kim, Min-Oh ; Chung, Taeyoung ; Oh, Yisok ; Lim, Sang-Chul ; Park, Jongho ; Kim, Jung-Ho
Author_Institution :
Sch. of Mech. Eng., Yonsei Univ., Yonsei, South Korea
Abstract :
We developed a batch-processed, flexible tactile sensor using carbon nanotube (CNT)-polymer composites. The fabricated sensor consists of a flexible substrate (polyimide), four flexible sensing parts (CNT-polymer composites) and a bump structure (SU-8). CNT-polymer composite was patterned on polyimide substrate through large area screen printing process. The proposed sensor structure has advantages in high sensitivity, mechanical flexibility and facile fabrication process. It showed outstanding piezoresistive characteristics in the pressure range up to 2 N.
Keywords :
carbon nanotubes; composite materials; polymers; tactile sensors; CNT-polymer composites; batch fabricated flexible tactile sensor; bump structure; carbon nanotube-polymer composites; facile fabrication process; four flexible sensing parts; mechanical flexibility; piezoresistive characteristics; polyimide substrate; sensor structure; Carbon nanotubes; Force; Resistance; Substrates; Tactile sensors; CNT-polymer composites; Flexibility; Piezoresistivity; Tactile sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626939