Title :
Multi-axial tactile sensor with micro-cantilever embedded in hemispherical elastomer for surface texture measurement
Author :
Watanabe, K. ; Sohgawa, Masayuki ; Kanashima, Takeshi ; Okuyama, Masanori ; Noma, Haruo ; Azuma, Teruaki
Author_Institution :
Osaka Univ., Suita, Japan
Abstract :
We have fabricated the multi-axial tactile sensor which has micro-cantilevers with strain gauge film on Si embedded in hemispherical elastomer, and various kinds of papers have been identified by active touch. Transient responses of the resistance change have been obtained when the sensor was pushed and moved on various kinds of blank papers successively. Some features are extracted from the response by a principal component analysis and the papers are classified in several clusters.
Keywords :
cantilevers; elastomers; feature extraction; microsensors; paper; principal component analysis; surface texture; tactile sensors; transient response; feature extraction; hemispherical elastomer; microcantilevers; multiaxial tactile sensor; papers; principal component analysis; strain gauge film; surface texture measurement; transient responses; Force; Rough surfaces; Surface resistance; Surface roughness; Tactile sensors; Active touch; Elastomer; MEMS; Principal component analysis; Tactile sensor; Texture identification;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626941
