Title :
Low Vibration Sensitivity MEMS Resonators
Author :
Wojciechowski, K.E. ; Olsson, Roy H. ; Baker, Michael S. ; Wittwer, J.W.
Author_Institution :
Sandia Nat. Lab., Albuquerque
fDate :
May 29 2007-June 1 2007
Abstract :
It is well known that the stability of crystal oscillator references is undermined in high-g environments [1,2]. This can result in failure of communications systems relying on the crystal as a frequency reference. Lower vibration sensitivity is theoretically achievable by replacing the crystal with a micro electromechanical (MEMS) resonator. In this paper we present an electrostatically actuated Lame resonator that has vibration sensitivity (0.91 ppb/g) comparable to the best high-g insensitive crystal oscillators.
Keywords :
crystal oscillators; electrostatics; micromechanical resonators; vibrations; Lame resonator; communications systems; electrostatic actuation; high-g insensitive crystal oscillator; low vibration sensitivity MEMS resonators; micro electromechanical resonator; Acoustic beams; Acoustic devices; Electrostatics; Laboratories; Micromechanical devices; Oscillators; Particle beams; Softening; Springs; Vibration measurement;
Conference_Titel :
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location :
Geneva
Print_ISBN :
978-1-4244-0646-3
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2007.4319271
