Title :
A new metallic glass Fe-B-Nd-Nb thin film material for micro sensors and actuators: Fabrication and characterization
Author :
Tuan, P.A. ; Oguchi, H. ; Hara, Masaki ; Shikida, Mitsuhiro ; Hida, Hirotaka ; Ando, Takehiro ; Sato, Kiminori ; Kuwano, Hiroki
Author_Institution :
Tohoku Univ., Sendai, Japan
Abstract :
In the first half of this paper we reports on the development of a Fe-B-Nd-Nb quaternary alloy magnetic metallic glass thin film. The Fe-B-Nd-Nb thin film deposited on the Si (100) substrate underwent crystallographic and thermal characterization to confirm its metallic glass state. In the second half of this paper we reports on the direct fracture toughness of the micro structure composed of the Fe-B-Nd-Nb metallic glass thin film using the micro device specially designed. The measurement revealed that the fracture toughness of the Fe-B-Nd-Nb metallic glass thin film is 6.4 MPa·m1/2, which is about four times higher than that of silicon.
Keywords :
amorphous magnetic materials; boron alloys; crystal microstructure; fracture toughness; iron alloys; magnetic thin films; metallic glasses; metallic thin films; microactuators; microsensors; neodymium alloys; niobium alloys; thermal analysis; FeBNdNb; Si; Si (100) substrate; crystallographic characterization; fracture toughness; microactuators; microsensors; quaternary alloy magnetic metallic glass thin film; thermal characterization; thin film microstructure; Actuators; Amorphous magnetic materials; Force; Glass; Magnetic films; Magnetic hysteresis; Silicon; MEMS; fracture toughness; metallic glass thin film;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626948
