Title :
Micromachining of diamond using near-field spanning optical microscope
Author :
Smolyaninov, I.I. ; Davis, C.C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD, USA
Abstract :
Summary form only given. We report the implementation of standard scanning near-field optical/shear force microscopy technique for high resolution surface ablation of diamond. The use of uncoated fiber tip and nanosecond pulsed 1060 nm neodymium: YAG laser light allowed us to deliver an estimated 100 MW/cm/sup 2/ light power into the tip-sample region of 500 nm /spl times/ 500 nm during a single laser pulse. This power was sufficient for local surface ablation of diamond (possibly, through an intermediate step of diamond conversion into graphite) without melting or damaging of,a transparent tapered fiber tip. The topography changes caused by irradiation were immediately in situ recorded by the shear force microscope. The developed technique also allows the study of early stages of the diamond ablation process.
Keywords :
diamond; laser ablation; laser beam machining; micromachining; near-field scanning optical microscopy; 1060 nm; C; conversion into graphite; diamond micromachining; high resolution surface ablation; initial local volume increase; local optical absorption; local surface ablation; near-field spanning optical microscope; shear force microscopy; topography changes; uncoated fiber tip; Diodes; Fiber lasers; Laser ablation; Micromachining; Optical microscopy; Optical pulses; Power lasers; Pump lasers; Surface emitting lasers; Surface topography;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-662-1
DOI :
10.1109/CLEO.2001.948185
