CuO nanowire gas sensors for CO detection in humid atmosphere

Author

Steinhauer, Stephan ; Brunet, Elise ; Maier, Thomas ; Mutinati, Giorgio C. ; Kock, Alexander

Author_Institution

AIT Austrian Inst. of Technol. GmbH, Vienna, Austria

fYear

2013

fDate

16-20 June 2013

Firstpage

1095

Lastpage

1098

Abstract

In this paper we report on conductometric gas sensors based on suspended CuO nanowire arrays for CO detection in humid atmosphere. CuO nanowires with very small diameters (10nm-30nm) are synthesized by a thermal oxidation process of Cu microstructures. Our approach allows efficient CuO nanowire integration using a CMOS backend compatible technology. We perform CO measurements in a concentration range between 25ppm and 150ppm and investigate humidity interference effects by comparing CO measurements in dry and humid atmosphere.

Keywords

CMOS integrated circuits; carbon compounds; copper compounds; gas sensors; humidity; nanoelectronics; nanosensors; nanowires; oxidation; semiconductor materials; sensor arrays; CMOS backend compatible technology; CO; CO detection; CuO; conductometric gas sensors; dry atmosphere; humid atmosphere; humidity interference effects; size 10 nm to 30 nm; suspended CuO nanowire arrays; thermal oxidation process; Gas detectors; Humidity; Oxidation; Resistance; Temperature measurement; Temperature sensors; CO detection; CuO nanowire; gas sensor; humidity interference; on-chip synthesis;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626962

Filename

6626962