Title :
CuO nanowire gas sensors for CO detection in humid atmosphere
Author :
Steinhauer, Stephan ; Brunet, Elise ; Maier, Thomas ; Mutinati, Giorgio C. ; Kock, Alexander
Author_Institution :
AIT Austrian Inst. of Technol. GmbH, Vienna, Austria
Abstract :
In this paper we report on conductometric gas sensors based on suspended CuO nanowire arrays for CO detection in humid atmosphere. CuO nanowires with very small diameters (10nm-30nm) are synthesized by a thermal oxidation process of Cu microstructures. Our approach allows efficient CuO nanowire integration using a CMOS backend compatible technology. We perform CO measurements in a concentration range between 25ppm and 150ppm and investigate humidity interference effects by comparing CO measurements in dry and humid atmosphere.
Keywords :
CMOS integrated circuits; carbon compounds; copper compounds; gas sensors; humidity; nanoelectronics; nanosensors; nanowires; oxidation; semiconductor materials; sensor arrays; CMOS backend compatible technology; CO; CO detection; CuO; conductometric gas sensors; dry atmosphere; humid atmosphere; humidity interference effects; size 10 nm to 30 nm; suspended CuO nanowire arrays; thermal oxidation process; Gas detectors; Humidity; Oxidation; Resistance; Temperature measurement; Temperature sensors; CO detection; CuO nanowire; gas sensor; humidity interference; on-chip synthesis;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626962
