Title :
Submicron IDT wave field investigation by scanning acoustic force microscopy
Author :
Hesjedal, T. ; Chilla, E. ; Fröhlich, H.J.
Author_Institution :
Paul-Drude Inst. for Solid-State Electron., Berlin, Germany
Abstract :
Reports a new technique for the investigation of SAW fields within SAW devices reaching submicron lateral resolution. The scanning acoustic force microscope (SAFM) is based on a standard force microscope and utilizes the nonlinear force curve in the sense of a mechanical diode. Varying wave amplitudes therefore lead to different shifts of the cantilever´s rest position. With SAFM we investigated SAW devices with center frequencies above 600 MHz. We found a local effect of mass loading on the standing wave amplitude within LDTs. Furthermore, we measured the dynamic behavior of the LDT´s wave pattern when sweeping the frequency
Keywords :
acoustic field; acoustic microscopy; interdigital transducers; surface acoustic wave transducers; SAW devices; center frequencies; dynamic behavior; mass loading; mechanical diode; nonlinear force curve; rest position; scanning acoustic force microscopy; standard force microscope; submicron IDT wave field investigation; submicron lateral resolution; wave amplitudes; Acoustic devices; Acoustic waves; Electrodes; Frequency; Optical distortion; Optical surface waves; Scanning electron microscopy; Surface acoustic wave devices; Surface acoustic waves; Surface topography;
Conference_Titel :
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
0-7803-3615-1
DOI :
10.1109/ULTSYM.1996.584119
